Ultrananocrystalline Diamond Membranes for Detection of High-Mass Proteins

Environmental Performance Limits of Ultrananocrystalline Diamond Films

Recent improvements in growth methodologies have decreased the grain sizes and thicknesses of polycrystalline diamond films to the nanometer range, while also increasing the film uniformity and growth rate and preserving the outstanding mechanical properties of diamond. This is rendering such films more technologically and commercially viable. Ultrananocrystalline diamond (UNCD) are the thinnes...

Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

Microcantilever deflection and the membrane deflection experiment (MDE) were used to examine the elastic and fracture properties of ultrananocrystalline diamond (UNCD) thin films in relation to their application to microelectromechanical systems (MEMS). Freestanding microcantilevers and membranes were fabricated using standard MEMS fabrication techniques adapted to our UNCD film technology. Ela...

Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications

Anirudha V. Sumant, Orlando Auciello, Robert W. Carpick, Sudarsan Srinivasan, and James E. Butler of smooth diamond films with uniform thickness and micro/nanostructure over large area substrates (≥150 mm diameter wafer), as recently demonstrated.1 Growth of thin (0.1 to 5 micron thick) diamond films on nondiamond substrates, typically conventional electronic substrates such as Si, SiC, and AlN...

Ultrananocrystalline Diamond as Material for Surface Acoustic Wave Devices

Novel ultrananocrystalline diamond probes for high-resolution low-wear nanolithographic techniques.

A hard, low-wear probe for contact-mode writing techniques, such as dip-pen nanolithography (DPN), was fabricated using ultrananocrystalline diamond (UNCD). Molding within anisotropically etched and oxidized pyramidal pits in silicon was used to obtain diamond tips with radii down to 30 nm through growth of UNCD films followed by selective etching of the silicon template substrate. The probes w...